Semiconductors

World Leader in Active Vibration Control
IDE's vast experience in semiconductor processing is based in large part on IDE's state-of-the-art environmental disturbance control systems. These were developed for E-beam lithography, electron microscopy, mask alignment, micro-lithography, micro-machining, micro-positioning, optical metrology machine vision, video microscopy, wafer probing, SEMs, STMs, TEMs, and surface profilers. As a result, it is widely acknowledged that IDE possess the largest base of active vibration control systems in the world.

• Lithography
• Mask Handling
• Metrology
• MEMS
• Process Tools