AIS 1

Advanced Imaging Stabilization
IDE's MK 3 Electro Magnetic Interference (EMI) Cancellation Systems are being used with Scanning Electron Microscopes (SEM) to enhance tool performance. The system objective is to measure existing fields and then generate counteracting fields to nullify the effects of magnetic strayfields at the electron beam. The AIS 1 uses several sensors to monitor environmental disturbances, using this information to actively stabilize the displayed image in scanning electron microscopes. It is handle to cover low-frequent (e.g. building-)vibrations, high frequent vibrations (of acoustic or floor vibration nature) and EMI disturbances.