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Edge Gripping End Effector
           
 

  • For wafers with 100 to 300 mm

  • Three contact points

  • Reduced contamination

  

Edge-Gripping End-Effector / Technical Specifications
 payload capacity 0.45 kg (1 lbs.)
 wafer sizes 300 mm (4 inch)
 power requirements pneumatic
 number of contact points 3 - 4