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Low cost of ownership Class 1 compatible (FED-STD-209E) High velocity motion Mature, robust DSP controller technology High MTBF Modular design Provides robot with a 4th axis Substantially increases wafer throughput
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TRX 300 / Material Handling Modules / Technical Specifications
| Parameters |
TRX-200 |
TRX-300 |
TRX-400 |
Custom |
| Travel |
485 mm (19 in.) |
966 mm (38 in.) |
1455 mm (57.3 in.) |
Consult IDE |
| Feedback Resolution |
0.5 µm |
1.0 µm |
1.0 µm |
> 1.0 µm |
| Maximum Speed |
1000 mm/sec. |
1500 mm/sec. |
1750 mm/sec. |
TBD |
| Repeatability End-to-End |
± 1.0 µm |
± 1.0 µm |
± 3.0 µm |
± 3 Encoder LSB |
| Stepping Time |
1.2 sec. |
1.43 sec. |
1.6 sec. |
TBD |
| Station Stepping Time |
1.1 sec. |
1.1 sec. |
1.1 sec. |
1.1 sec. |
| Dimension (A) |
840 mm (33 in.) |
1325 mm (52.2 in.) |
1810 mm (71.3 in.) |
Consult IDE |
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