Integrated Dynamics Engineering (IDE) is a worldwide leader developing
and manufacturing environmental controls for EMI active compensation and active and
passive vibration and acoustic isolation for research, metrology, lithography and medical systems;
plus precision motion controls and robots for wafer and mask handling,
tool platforms and EFEMs for semiconductor OEMs.

PROCEDURES

> Core competence in system
   architecture

> Mechatronic system dynamics
   development

> Experience in fully integrating
   modular components and     
   subsystems

PRODUCTS

> Active and Passive Vibration
    Isolation Systems

> Robotic Modules to complete
   EFEM solutions

> Substrate Positioning Systems

> Active Compensation Systems
    for Electromagnetic Stray fields

> Acoustic Enclosures