IDE News

Integrated Dynamics Engineering (IDE) Enters 450mm Wafer Equipment Market With Advanced STC Active Vibration Isolation System

STC Series

Raunheim, Germany, June 27, 2012 ---The Integrated Dynamics Engineering (IDE) Group has announced the development of its STC series of next Generation Active Vibration Isolation Systems supporting OEMs in the production of 450mm wafer equipment.

A firm order from a global OEM metrology manufacturer is already underway at IDE’s main production facility and headquarters in Raunheim, Germany. IDE U.S. is in Randolph, MA.

The name of the 450mm OEM customer has not been disclosed at this time, but Thomas Breser, Managing Director of IDE, said, “The 450mm STC vibration isolation order is substantial. Our initial shipment of custom-designed IDE isolators to this customer will wrap up shortly, with more in the pipeline.”

The easy-to-install STC vibration isolation system uses advanced stage motion compensation technology. It significantly reduces vibration levels and settling time, to enable high resolution imaging and critical measurement while increasing throughput.

There are more than 10,000 IDE environmental control isolation systems installed worldwide. IDE is a 20-year leader in active vibration isolation, EMI cancellation, and acoustic controls supporting global semiconductor manufacturing and advanced microscopy.

The IDE Group is part of the semiconductor division of Aalberts Industries, Langbroek, The Netherlands. Aalberts Industries is a world leader in the development and production of complex high precision industrial components, with 150 companies and more than 12,000 employees worldwide. For more information on the IDE Group, visit

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